MX_033 – 9001

Thanks to the flexures’s bearings, this XYZ stage has intrinsically an outstanding precision, reliability and dynamics. Absolutely free of friction, wear and backlash, this device perfectly fit clean rooms and vacuum requirements. Based on a delta parallel kinematics, the MX_033-9001 is an attractive solution for lifetime and maintenance-free positioner. The minimum incremental motion is not mechanically limited and is, according with the sensor resolution, in nanometer range.

Magnetic Direct Drive and Optical linear scale version
The voice-coil drives combined with an optical linear scale, makes this device completely friction and mechanical play free.The drives for super-smooth velocity and position control fit also for high velocity and acceleration requirements.

Rotative DC motor version
For less demanding dynamics characteristics, a version with rotative DC motors is also available.

Absolute linear encoders are available for both versions as standard options.

Fields of application
Industry and research with very high accuracy, dynamic, cleanliness requirements.