Dynamics High Precision Linear Stage 50mm

High Precision Direct Drive Linear Stage

Details

 

Fast scanning and positioning


Travel range 50 mm


Max Speed to 200 mm/s


Scanning frequencies more than 10Hz


Bidirectional repeatability to 0.5µm


High resolution absolute linear encoder


Long life recirculating linear ball bearing guides

MX_079 – 9012
Long live recirculating linear ball bearing guides are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. This makes the stage MX_079-9012 an attractive solution for high precision industrial applications.

Magnetic Direct Drive
The direct transmission through ironless magnetic drive avoids friction and mechanical play. The drives with zero cogging for super-smooth velocity and position control allows high velocity and acceleration.  Undesirable effects limiting the precision, like non-linearities or mechanical play are than avoides.

High resolution absolute linear encoder
Direct position measurement with absolute linear encoders are available as standard options. The direct measure of the position consents to reach high accuracy and enable minimum incremental motion down to 50 nm and sub-micrometre repeatability. An optional factory calibration to improve positioning accuracy is also available.

Fields of application
Industry and research with High dynamic requirements.

MX_079–9005-25UnitTolerances
Motion and position
Active axisX (Z with gravity compensation)
Travel range25mm
Integrated sensorOptical Linear Scale
Sensor resolution1nm
Min. incremental motion50nmTyp
Unidirectional repeatabilityμm
Bidirectional repeatability0.5μmTyp
Pitch40μradTyp
Yaw40μradTyp
Horizontal Straightness1μmTyp
Vertical Straightness1μmTyp
Max Speed200mm/s
Mechanical properties
Load capacity in Z50N
Drive properties
Drive typeIronless linear motor
Mischellaneous
Housing materialAluminium black anodized
Operating temperature18-28°C
Humidity20-80%