Flexures based high stiffness rotary stage
Details
High precision
Stroke 20 mrad
Resolution obtained 0.2µrad
Eigen Frequency ~200Hz
Environment: Radiation, Vacuum
Guiding principle: Flexures
MX_060 – 9013 this goniometer is a result of a specific development for the CERN in Geneva
Fields of application CERN, LHC
