Very High Precision Goniometer

Flexures based high stiffness rotary stage

Details

 

High precision


Stroke 20 mrad


Resolution obtained 0.2µrad


Eigen Frequency ~200Hz


Environment: Radiation, Vavuum


Guiding principle: Flexures

MX_060 – 9013
this goniometer is a result of a development ……….

 

Fields of application
CERN, LHC