MX_074 – 9400 – Direct Drive XY Stage 220mm

High Precision Direct Drive XY Stage with Aperture

Details

 

Fast scanning and positioning


Travel range 220×220 mm


Max Speed to 500 mm/s


Max Acceleration to 1.5g


Bidirectional repeatability to 0.4µm


High resolution absolute linear encoder


Long life recirculating linear ball bearing guides

MX_074 – 9400
Long live recirculating linear ball bearing guides are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. This makes the MX_074-9400 an attractive solution for high precision industrial applications such as laser machining.

Magnetic Direct Drive
The ironless magnetic drives used in the direct transmission, apply the force directly to the movable part without any friction and practically without cogging . This avoids several undesirable effects limiting the precision, like non-linearities or mechanical play. Ironless magnetic drives are suitable for high velocity and acceleration.

High resolution absolute linear encoder
Direct position measurement with absolute linear encoders are available as standard options. The direct measure of the position consents to reach high accuracy and enable minimum incremental motion down to 50 nm and sub-micrometre repeatability. An optional factory calibration to improve positioning accuracy is also available.

Fields of application
Industry and research with High dynamic requirements.

MX_074–9400-200UnitNote
Motion and position
Active axisX-Y
Travel range220 x 220mm
Integrated sensorAbsolute optical EnDat 2.2 Optical 1 Vpp (optional)
Sensor resolution1nmEnDat 2.2
Min. incremental motion50nm
Bidirectional repeatability±0.3μmTyp
Orthogonality ±30
Pitch±60 μradTyp
Yaw±60 μradTyp
Flatness±2 μmTyp
Straightness±2 μmTyp
Max Speed500mm/s
Max Acceleration15mm/s2
Mechanical properties
Moving mass X22.5kg
Moving mass Y10.5kg
Load capacity in Z5kg
Drive properties
Drive typeIronless 3-phases motor
Operating voltage MAX300V
Peak current X / Y22 / 11Arms
Continuous current X / Y6.4 / 3.2Arms
Peak force X / Y800 / 400N
Continuous force X / Y232 / 116N
Motor force contante X / Y72.6 / 72.6N/Arms
Motor contante X / Y190 / 96N2/W
Mischellaneous
Housing materialAluminium black anodized
Operating temperature18-28°C
Humidity20-80%